Thin film based fan out and multi die package platform

ABSTRACT

Thin film based fan out wafer level packaging and a method of manufacturing the same are disclosed. Embodiments include a method including forming tapered via holes in a first surface of a polymer film; forming a conductive pillar on the first surface of a semiconductor device; bonding a solderable surface of the conductive copper pillars to metallization on the second side of the polymer film; bonding the semiconductor device to the first surface of the polymer film over the conductive pillars with an underfill material; and depositing an encapsulant material over the semiconductor device and polymer film.

RELATED APPLICATION

The present application is a Divisional of application Ser. No.14/718,314, filed on May 21, 2015, which is incorporated herein byreference in its entirety.

TECHNICAL FIELD

The present invention relates to post wafer fabrication. The presentdisclosure is particularly applicable to thin film based fan out waferlevel packaging and a method of manufacturing the same.

BACKGROUND

The semiconductor far back end assembly and packaging industry is inneed of a low cost packaging solution for higher interconnect densityand smaller form factor for mobile and internet-of-things (IoT)applications as well as others. One existing solution is fan out waferlevel chip scale packaging (FOWLCSP). While this solution has beendeployed on a limited basis, it has a high cost and limited scalability.A goal with this solution is to move from a 330 millimeter (mm) diameterround substrate to a 500×500 mm square substrate for cost reduction.However, this solution also has an inherent disadvantage of handlinglarge thin panels as well as pattern run out across the panel. Both ofthese disadvantages drive higher manufacturing tool costs and minimizeany potential savings associated with this solution.

An example of a conventional FOWLCSP in a package on package (PoP)configuration is illustrated in FIG. 1A. PoP wafer level fan out packageincludes a stack package 101 and wafer level fan out package 103. Stackpackage 101 such as a memory or a chip size package may be coupled to anelectrically conductive pattern 105 of the wafer level fan out package103. The stack package 101 includes first and second semiconductor dies107, 109, substrate 111, an encapsulant 113, and solder balls 115. Thesolder balls 115 are coupled to the electrically conductive pattern 105.Wafer level fan out package 103 further includes conductive vias 117,semiconductor die 119, and solder balls 121. Chip suppliers and mobileproduct manufacturers desire increased functionality of products byincreasing silicon content and interconnects between silicon chips,while at the same time maintaining low costs, producing thin productswith a small footprint package.

FIG. 1B is an example of a conventional fan-in wafer level packagehaving a silicon die, 121, bump or land connections 129 and metalconductors 127. FIG. 1C is an example of a wafer level fan out packageincluding a silicon die 121 that is typically encapsulated in an epoxybased thermoset material 123. Unlike conventional wafer level packagesof FIG. 1B, where all the connections from the package to the next levelof interconnect such as a system or module level printed circuit boardmust be contained within the area of the surface of the silicon die 121itself, conventional fan out wafer level chip scale packaging of FIG. 1Cutilizes the encapsulation material 123 as an extension onto whichdielectric material 125 and metal conductors 127 can be patternedextending interconnect to next level with a larger quantity of bump orland connections 129 and/or a larger pitch between connections.

A need therefore exists for methodology enabling utilization of maturefilm based technology to create a thinner package at reduced cost byusing lower cost manufacturing equipment and which does not depend onpanel based processing that drives higher manufacturing equipment costsand results in total manufacturing costs that exceed the markets abilityto pay.

SUMMARY

An aspect of the present disclosure is a method of forming a patternedpolymer film, such as a polyimide film, to create a high densityinterconnect from a chip to another chip, or from a chip to an externalbonding point.

Another aspect of the present disclosure is a patterned polymer film,such as a polyimide film, to create a high density interconnect from achip to another chip, or from a chip to an external bonding point.

Additional aspects and other features of the present disclosure will beset forth in the description which follows and in part will be apparentto those having ordinary skill in the art upon examination of thefollowing or may be learned from the practice of the present disclosure.The advantages of the present disclosure may be realized and obtained asparticularly pointed out in the appended claims.

According to the present disclosure, some technical effects may beachieved in part by a method of fabricating a semiconductor device, themethod including forming tapered via holes in a first surface of apolymer film; forming a conductive pillar on the first surface of asemiconductor device; bonding a solderable surface of the conductivecopper pillars to metallization on the second side of the polymer film;bonding the semiconductor device to the first surface of the polymerfilm over the conductive pillars with an underfill material; anddepositing an encapsulant material over the semiconductor device andpolymer film.

Aspects of the present disclosure include forming the tapered via holesin the first surface of the polymer film with laser ablation or etching.Other aspects include the polymer film including a polyimide. Anotheraspect includes the metallization on the second surface of the polymerfilm includes electrically conductive patterns on the second surface ofthe polymer film; the tapered via holes terminate at the electricallyconductive pattern; the conductive pillars on the first surface of thesemiconductor device have positions corresponding to those of thetapered via holds on the first surface of a polymer film; thesemiconductor device is electrically connected to the electricallyconductive patterns on the second surface of the polymer film using thetapered via holes to position and align the semiconductor device withcorresponding via holes. Yet other aspects include subjecting the secondsurface of the polymer film to copper patterning; and forming solderbumps on the second surface of the polymer film after the copperpatterning. Another aspect includes the solder bumps comprise tin (Sn)and silver (Ag). Further aspects include the underfill materialincluding a no flow underfill material. Other aspects include curing theno flow underfill material after bonding the semiconductor device. Yetother aspects include encapsulating the semiconductor device on foursides leaving the second surface of the semiconductor device exposed orencapsulating the semiconductor device on five sides covering the secondsurface of the semiconductor device. Other aspects include forming thetapered via holes to have a first diameter proximate to thesemiconductor device and a second diameter remote from the semiconductordevice, the first diameter being larger than the second diameter. Theconductive pillars have a third diameter smaller than the first andsecond diameters of the tapered via holes, the conductive pillarscomprises a solderable material comprising Sn-Ag on a surface of thepillar not in contact with the semiconductor device, a height of theconductive pillar and solderable material is similar to a thickness ofthe polymer film, such that when the semiconductor device is bonded tothe polymer film a distance between the first surface of thesemiconductor device and the first surface of the polymer film is equalto a desired thickness of underfill material. Another aspect includesdepositing and patterning a dielectric layer on the second surface ofthe polymer film prior to forming the solder bumps.

Another aspect of the present disclosure is a device including: apolymer film having tapered vias formed therein; a semiconductor devicehaving conductive pillars with deposited solder on a surface oppositethe semiconductor device and the conductive pillars being bonded to afirst surface of the polymer film over the conductive pillars with anunderfill material; and an encapsulant material deposited over thesemiconductor device and polymer film, wherein the underfill materialbonds a surface of the semiconductor device to the first surface of thepolymer film to permit movement during temperature cycling.

Aspects include the encapsulant material including an epoxy molding.Other aspects include the underfill material including a cured no flowunderfill material. Yet other aspects include the conductive pillarsincluding Cu. Further aspects include the polymer film including apolyimide.

Other aspects include the use of multiple layers of polymer film andmultiple layers of patterned conductors where layers of conductors maybe connected by use of conductive vias either between two adjacentlayers of conductors or between non-adjacent layers of conductors. Byadding multiple layers of polymer film and conductive patterns, theinterconnect density between chips or from a chip to its next bondingpoint can be increased.

Other aspects include a method including: forming tapered via holes in afirst surface of a polyimide film with laser ablation or etching, thetapered via holes having a first diameter proximate the first surface ofthe polyimide film and second diameter remote from the first surface,the first diameter being larger than the second diameter; forming aconductive pillar in each of the tapered via holes each conductivepillar being clad to the polyimide film or adhesively attached to thepolyimide film; bonding a semiconductor device to the first surface ofthe polyimide film over the conductive copper pillars with a no flowunderfill material; depositing an epoxy molding material as anencapsulant over the semiconductor device and polyimide film.

Aspects include curing the no flow underfill material after bonding ofthe semiconductor device. Other aspects include subjecting a secondsurface of the polymer film to copper patterning; and forming solderbumps on the second surface of the polymer film after the copperpatterning. Further aspects include depositing and patterning adielectric layer on the second surface of the polyimide film prior toforming the solder bumps.

Additional aspects and technical effects of the present disclosure willbecome readily apparent to those skilled in the art from the followingdetailed description wherein embodiments of the present disclosure aredescribed simply by way of illustration of the best mode contemplated tocarry out the present disclosure. As will be realized, the presentdisclosure is capable of other and different embodiments, and itsseveral details are capable of modifications in various obviousrespects, all without departing from the present disclosure.Accordingly, the drawings and description are to be regarded asillustrative in nature, and not as restrictive.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is illustrated by way of example, and not by wayof limitation, in the figures of the accompanying drawing and in whichlike reference numerals refer to similar elements and in which:

FIG. 1A is a cross-sectional view illustrating a conventional FOWLCSP ina PoP configuration;

FIG. 1B is cross-sectional view illustrating a conventional fan-in waferlevel package, and FIG. 1C is a cross-sectional view illustrating aconventional fan-out wafer level package;

FIGS. 2A through 5 schematically illustrate cross sectional views of aprocess flow to produce a thin film based fan out and multi die package,in accordance with an exemplary embodiment; and

FIGS. 6A through 6C are top, side and bottom views, respectively, of thethin film structure, in accordance with an exemplary embodiment.

FIG. 7 illustrates a cross-sectional view of a structure with multiplelayers of polymer film and multiple layers of patterned conductors.

DETAILED DESCRIPTION

In the following description, for the purposes of explanation, numerousspecific details are set forth in order to provide a thoroughunderstanding of exemplary embodiments. It should be apparent, however,that exemplary embodiments may be practiced without these specificdetails or with an equivalent arrangement. In other instances,well-known structures and devices are shown in block diagram form inorder to avoid unnecessarily obscuring exemplary embodiments. Inaddition, unless otherwise indicated, all numbers expressing quantities,ratios, and numerical properties of ingredients, reaction conditions,and so forth used in the specification and claims are to be understoodas being modified in all instances by the term “about.”

The present disclosure addresses and solves the current problems oflarge thin panels as well as pattern run out across the panel attendantupon panel based processing of fan out WLCSP which has the inherentdisadvantage of handling. In accordance with embodiments of the presentdisclosure, a mature film based technology is used to create a thinnerpackage at a lower cost.

Methodology in accordance with embodiments of the present disclosureincludes forming tapered via holes in a first surface of a polymer film.A conductive pillar is formed in each of the tapered via holes. Asemiconductor device is bonded to the first surface of the polymer filmover the conductive pillars with an underfill material. An encapsulantmaterial is formed over the semiconductor device and polymer film

Still other aspects, features, and technical effects will be readilyapparent to those skilled in this art from the following detaileddescription, wherein preferred embodiments are shown and described,simply by way of illustration of the best mode contemplated. Thedisclosure is capable of other and different embodiments, and itsseveral details are capable of modifications in various obviousrespects. Accordingly, the drawings and description are to be regardedas illustrative in nature, and not as restrictive.

Adverting to FIG. 2A, a polymer film 201 is illustrated. The polymerfilm 201 has a high thermostability (e.g., high heat-resistance). Anexample of a polymer used in the film is a polyimide which is a polymerof imide monomers. Polyimides are known for thermal stability, goodchemical resistance, and excellent mechanical properties. Polyimidefilms have good mechanical elongation and tensile strength, which alsohelp the adhesion between the polyimide film and a deposited metallayer. In FIG. 2A, the polymer film contains vias 203 which are formedin the film by either etching or laser ablation. The polymer film has athickness of 50 μm or less. Prior to forming the vias 203, a copperlayer is adhered to the polymer film 201 and patterned to producepatterned copper film 205. The vias 203 are tapered via holes.

In FIG. 2B, conductive pillars 209 are formed on semiconductor device207. The conductive pillars have a solderable material/cap 210 formed ona surface opposite to where the conductive pillar is attached to thesemiconductor device. The conductive pillars include a Cu pillar bodyand a solderable material/cap 210 such as nickel (Ni), tin (Sn) orsilver (Ag). The height of the Cu pillar and cap is about the same asthe thickness of the polymer film. As shown in FIG. 2C, a thin layer,for example a layer 5 to 20 μm in thickness, of adhesive 211 is formedon the semiconductor device 207 between the Cu pillars 209 that willserve as an underfill of the final package. The underfill provides forstrain management in the final package. A final package having athickness of less than 100 μm is achievable.

FIG. 3 illustrates semiconductor device (e.g., semiconductor chip) 207bonded to the polymer film 201 with Cu pillars 209 protruding in thetapered via holes 203. Prior to bonding, a copper pad 213 may be exposedthrough the via holes 203 in the polymer film 201, and its surface maybe coated with a barrier and solderable material such as Ni, Sn or Ag.Due to the tapered shape of via holes 203, the alignment of the Cupillars 209 during bonding is improved. The tapered shape of the viasholes 203 help self align the Cu pillars 209 during bonding. The taperedvia holes in the polymer film will provide for self alignment allowingfor faster bonding speed and less costly placement equipment. The Cupillars 209 protrude into the via holes 203 to create conductive viaswhen soldered to the patterned Cu film 205. The adhesive 211 is a noflow underfill material that bonds the semiconductor device surface tothe polymer film 201 and which allows for movement between the to beapplied solder bumps and the semiconductor device during temperaturecycling. The Cu pillars 209 have a height approximately equal to thethickness of the polymer film 201. The semiconductor device 207 ispositioned such that the Cu pillars 209 protrude into the via holes inthe polymer film 201 and the solder caps of the Cu pillars 209 makecontact with the solderable coating of the patterned copper film 205.The Cu pillars 209 and the patterned copper film 205 are solderedtogether by heating the solder caps of the Cu pillars 209 to the meltingpoint of the solder caps while in contact with the Cu pillars 209 andthe patterned copper film 205. The adhesive 211 (i.e., no flow underfillmaterial) is thermally cured to secure the polymer film 201 to thesurface of the semiconductor device 207. The adhesive 211 is an epoxybased material.

As shown in FIG. 4, an epoxy molding compound 401 is formed over thepolymer film 201 and semiconductor device 207 to encapsulate them both.The encapsulation includes encapsulating the semiconductor device onfour sides leaving the second surface of the semiconductor deviceexposed or encapsulating the semiconductor device on five sides coveringthe second surface of the semiconductor device. Adverting to FIG. 5,solder bumps 501 are applied to the surface of the polymer film 201having the patterned copper film 205. The solder bumps 501 serve as away to mount to semiconductor device 207 to matching pads of externalcircuitry such as a printed circuit board (PCB) or another semiconductordevice/chip or wafer. The solder bumps may be made of Sn and Ag andother elements.

In FIGS. 6A, 6B and 6C, the top, side and bottom views are respectivelyshown for the thin film polymer structure. Polymer film 201 is shownwith tapered via holes 203 formed therein and patterned Cu film 205applied to a surface of the polymer film 201. A patterned dielectriclayer (not shown) may be provided over the patterned Cu film 205. Thedielectric layer may be applied to prevent wicking of the solder ballsand prevent electrical shorting. The polymer film as shown in FIGS. 6A,6B and 6C is provided in a film roll with perforations 601 along theside edges. Assembly can be done on existing manufacturing equipment aspolymer strips/reels with tooling change.

FIG. 7 illustrates an example of the use of multiple layers of polymerfilm 701 and multiple layers of patterned conductors 703 where layers ofconductors 703 may be connected by use of conductive vias 705 eitherbetween two adjacent layers of conductors 703 or between non-adjacentlayers of conductors 703. Adhesive 707 is positioned between adjacentlayers of polymer film 701. By adding multiple layers of polymer film701 and conductive patterns 703, the interconnect density between chipsor from a chip to its next bonding point can be increased.

The embodiments of the present disclosure can achieve several technicaleffects, such as increasing silicon content and interconnect betweensilicon chips at a lower coast and smaller footprint package. A singlemetal layer (or more than one) can be patterned with fine lines andspaces. Via hole formation in film is less costly than in other commonmaterials used in semiconductor packaging. Cu pillar technology is amature and cost effective technology and creating a post/pillar requiresless plating time than filling an equivalent via with a seeded sidewall. Film thickness in the present application can be 25 μm of lesswhich is thinner than any other packaging substrate material and onlyslightly thicker than conventional build up patterning in FO-WLCSP.Using Cu pillars as vias allow for the thinnest possible final package(i.e., less than 100 μm) which is very desirable. Moreover, with thepresent application, the assembly can be done on existing manufacturingequipment as strips with tooling change or reel to reel line can used toachieve the lowest cost, similar to RFID tag. As discussed above, thetaper of the film via holes provides for self alignment and allows forfaster bonding speed and less costly placement equipment. In addition,by using commercially available film purchased in a volume need tosupport the quantity of final products desired will reduce capital riskassociated with panel based FO-WLP solutions which depend on more costlymanufacturing equipment and their associated fixed costs which do notchange as a result of the quantity of products produced on a givenmachine.

Devices formed in accordance with embodiments of the present disclosureenjoy utility in various industrial applications, e.g., microprocessors,smart phones, mobile phones, cellular handsets, set-top boxes, DVDrecorders and players, automotive navigation, printers and peripherals,networking and telecom equipment, gaming systems, and digital cameras.The present disclosure therefore enjoys industrial applicability in themanufacture of any of various types of highly integrated semiconductordevices using thin film based fan out and multi die package platforms.

In the preceding description, the present disclosure is described withreference to specifically exemplary embodiments thereof. It will,however, be evident that various modifications and changes may be madethereto without departing from the broader spirit and scope of thepresent disclosure, as set forth in the claims. The specification anddrawings are, accordingly, to be regarded as illustrative and not asrestrictive. It is understood that the present disclosure is capable ofusing various other combinations and embodiments and is capable of anychanges or modifications within the scope of the inventive concept asexpressed herein.

What is claimed is:
 1. A device comprising: a polymer film havingtapered vias formed therein; a semiconductor device having conductivepillars with deposited solder on a surface opposite the semiconductordevice and the conductive pillars being bonded to a first surface of thepolymer film over the conductive pillars with an underfill material; andan encapsulant material deposited over the semiconductor device andpolymer film, wherein the underfill material bonds a surface of thesemiconductor device to the first surface of the polymer film to permitmovement during temperature cycling.
 2. The device according to claim 1,wherein the encapsulant material comprises an epoxy molding.
 3. Thedevice according to claim 1, wherein the underfill material comprises acured no flow underfill material.
 4. The device according to claim 1,wherein the conductive pillars comprise copper (Cu) and the polymer filmcomprises a polyimide.
 5. The device according to claim 1, furthercomprising a plurality of polymer film layers and a plurality ofpatterned conductors connected by conductive vias either between twoadjacent layers of patterned conductors or between non-adjacent layersof patterned conductors.
 6. A device comprising: a polymer film havingtapered vias formed therein; a semiconductor device having conductivepillars with deposited solder on a surface opposite the semiconductordevice and the conductive pillars being bonded to a first surface of thepolymer film over the conductive pillars with an underfill material; andan encapsulant material deposited over the semiconductor device andpolymer film, wherein the underfill material is in direct contact with aplurality is sides of each conductive pillar and fills a portion of eachtapered via hole.
 7. The device according to claim 6, wherein theunderfill material bonds a surface of the semiconductor device to thefirst surface of the polymer film to permit movement during temperaturecycling.
 8. The device according to claim 6, wherein the encapsulantmaterial comprises an epoxy molding.
 9. The device according to claim 6,wherein the underfill material comprises a cured no flow underfillmaterial.
 10. The device according to claim 6, wherein the conductivepillars comprise copper (Cu) and the polymer film comprises a polyimide.11. The device according to claim 6, further comprising a plurality ofpolymer film layers and a plurality of patterned conductors connected byconductive vias either between two adjacent layers of patternedconductors or between non-adjacent layers of patterned conductors.
 12. Adevice comprising: a polymer film layer having tapered vias formedtherein; a semiconductor device having conductive pillars with depositedsolder on a surface opposite the semiconductor device and the conductivepillars being bonded to a first surface of the polymer film over theconductive pillars with an underfill material; and an encapsulantmaterial deposited over the semiconductor device and polymer film,wherein the polymer film layer comprises a plurality of polymer filmlayers and a plurality of patterned conductors connected by conductivevias either between two adjacent layers of patterned conductors orbetween non-adjacent layers of patterned conductors.
 13. The deviceaccording to claim 12, wherein the underfill material is in directcontact with a plurality is sides of each conductive pillar and fills aportion of each tapered via hole.
 14. The device according to claim 12,wherein the underfill material bonds a surface of the semiconductordevice to the first surface of the polymer film to permit movementduring temperature cycling.
 15. The device according to claim 12,wherein the encapsulant material comprises an epoxy molding.
 16. Thedevice according to claim 12, wherein the underfill material comprises acured no flow underfill material.
 17. The device according to claim 12,wherein the conductive pillars comprise copper (Cu) and the polymer filmcomprises a polyimide.
 18. The device according to claim 12, wherein thesolder comprises tin (Sn) and silver (Ag).
 19. The device according toclaim 12, wherein the conductive pillars are bonded to metallization ona second surface of the polymer film layer, and wherein: themetallization on the second surface of the polymer film includeselectrically conductive patterns on the second surface of the polymerfilm; the tapered via holes terminate at the electrically conductivepattern; the conductive pillars on the first surface of thesemiconductor device have positions corresponding to those of thetapered via holds on the first surface of a polymer film; and thesemiconductor device is electrically connected to the electricallyconductive patterns on the second surface of the polymer film using thetapered via holes to position and align the semiconductor device withcorresponding via holes.
 20. The device according to claim 19, whereinthe second surface of the polymer film includes copper patterning; andsolder bumps are formed on the second surface of the polymer film afterthe copper patterning.